Method of fabricating optical devices using laser treatment of contact regions of gallium and nitrogen containing material
US8975615B2 · kind B2 · utility
20Cited by
39References
21Claims
0Family size
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Key dates
| Filing date | Nov 8, 2011 |
| Grant date | Mar 10, 2015 |
| Priority date | — |
| Expiry date | Nov 8, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/01
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for forming optical devices includes providing a gallium nitride substrate having a crystalline surface region and a backside region. The backside is subjected to a laser scribing process to form scribe regions. Metal contacts overly the scribe regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.