Patent · US Active

Adjustable ventilation openings in MEMS structures

US8983097B2 · kind B2 · utility

26Cited by

6References

17Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Alfons Dehe · Reutlingen, DE
Martin Wurzer · Munich, DE

Key dates

Filing date	Feb 29, 2012
Grant date	Mar 17, 2015
Priority date	—
Expiry date	Jan 13, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A MEMS structure and a method for operation a MEMS structure are disclosed. In accordance with an embodiment of the present invention, a MEMS structure comprises a substrate, a backplate, and a membrane comprising a first region and a second region, wherein the first region is configured to sense a signal and the second region is configured to adjust a threshold frequency from a first value to a second value, and wherein the backplate and the membrane are mechanically connected to the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.