Mounting structures for multi-detector electron microscopes
US8993963B2 · kind B2 · utility
1Cited by
49References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 7, 2014 |
| Grant date | Mar 31, 2015 |
| Priority date | — |
| Expiry date | Jul 7, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A detector support for an electron microscope including a detector support ring and flexible elements, wherein a first end of each of the flexible elements is connected to the support ring, and wherein the detector support ring and the flexible elements are configured to support at least two detectors in a circumferential arrangement around an optical axis of the electron microscope such that an optical axis of each of the at least two detectors intersects the optical axis of the electron microscope and a target point of the at least two detectors is maintained relatively constant over a temperature change.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.