Method and apparatus of tuning a scanning probe microscope
US8997259B2 · kind B2 · utility
4Cited by
4References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 12, 2012 |
| Grant date | Mar 31, 2015 |
| Priority date | — |
| Expiry date | Nov 14, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q40/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.