Processing apparatus and processing method
US8998552B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2009 |
| Grant date | Apr 7, 2015 |
| Priority date | — |
| Expiry date | Apr 21, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6776
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
To provide a processor and a processing method to make the operation to load and unload workpieces to and from a processing chamber more efficient, and improve workpiece processing efficiency.A processor equipped with a processing chamber 10 wherein a first supply/discharge port and a second supply/discharge port have been provided, characterized by being equipped with a first transport mechanism to perform an operation to supply and discharge workpieces 30 via the aforementioned first supply/discharge port, a second transport mechanism to perform an operation to supply and discharge workpieces 30 via the aforementioned second supply/discharge port, an exchange means to deliver workpieces 30a that have been loaded for processing by the aforementioned first transport mechanism to the aforementioned second transport mechanism, and deliver workpieces 32a that have been loaded for processing by the aforementioned second transport mechanism to the first transport mechanism, and a control unit 22 to drive the aforementioned first transport mechanism and second transport mechanism, and alternately supply unprocessed workpieces from the aforementioned first supply/discharge port and the af…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.