ORBOTECH LT SOLAR, LLC.
9Patents
9Active
9Granted
45Portfolio score
Filing activity: Jun 30, 2006 → Nov 3, 2017 · 2 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7695233B2 | Substrate processing apparatus | Electricity | 11 | Active |
| US8444364B2 | Auto-sequencing multi-directional inline processing apparatus | Emerging Cross-Sectional Technologies | 9 | Active |
| US8459276B2 | Broken wafer recovery system | Electricity | 5 | Active |
| US8617349B2 | Showerhead assembly for plasma processing chamber | Emerging Cross-Sectional Technologies | 4 | Active |
| US8672603B2 | Auto-sequencing inline processing apparatus | Emerging Cross-Sectional Technologies | 4 | Active |
| US9287152B2 | Auto-sequencing multi-directional inline processing method | Emerging Cross-Sectional Technologies | 3 | Active |
| US8998552B2 | Processing apparatus and processing method | Electricity | 3 | Active |
| US9462921B2 | Broken wafer recovery system | Electricity | 0 | Active |
| US10333104B2 | Method and apparatus for encapsulation of an organic light emitting diode | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.