Process chamber component having yttrium—aluminum coating
US9012030B2 · kind B2 · utility
28Cited by
93References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 7, 2012 |
| Grant date | Apr 21, 2015 |
| Priority date | — |
| Expiry date | May 2, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12806
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A substrate processing chamber component comprising a chamber component structure having an yttrium-aluminum coating. The yttrium-aluminum coating comprises a compositional gradient through a thickness of the coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.