Patent · US Active

Method for treating a bond pad of a package substrate

US9012263B1 · kind B1 · utility

43Cited by
1References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 31, 2013
Grant dateApr 21, 2015
Priority date
Expiry dateOct 31, 2033

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/181
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method of making a package substrate having a copper bond pad and a location for receiving a semiconductor die having a remnant of one of a group consisting of HEDP and an HEDP derivative on a top surface of the copper bond pad. The semiconductor die is attached to the substrate. A wirebond connection is attached between the remnant and the semiconductor die.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.