Methods and apparatus for sensing a substrate in a load cup
US9013176B2 · kind B2 · utility
1Cited by
7References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 2012 |
| Grant date | Apr 21, 2015 |
| Priority date | — |
| Expiry date | Sep 4, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/023
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods, apparatus, and systems are provided for detecting the presence of a substrate in a load cup. The invention includes a proximity sensor having a detection pad disposed below a contact surface of a load cup assembly and a target disposed on a lever member and adapted to move toward the detection pad when a substrate is placed on the lever member and adapted to move away from the detection pad when a substrate is removed from the lever member. Numerous additional aspects are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.