Jim K. Atkinson
11Patents
3h-index
20Co-inventors
56Inventor score
Filing activity: Oct 5, 2009 → Aug 2, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8968055B2 | Methods and apparatus for pre-chemical mechanical planarization buffing module | Performing Operations; Transporting | 6 | Active |
| US8869422B2 | Methods and apparatus for marangoni substrate drying using a vapor knife manifold | Electricity | 6 | Active |
| US9352471B1 | Substrate gripper apparatus and methods | Performing Operations; Transporting | 3 | Active |
| US8250695B2 | Roller assembly for a brush cleaning device in a cleaning module | Performing Operations; Transporting | 2 | Active |
| US10229842B2 | Double sided buff module for post CMP cleaning | Electricity | 1 | Active |
| US9013176B2 | Methods and apparatus for sensing a substrate in a load cup | Physics | 1 | Active |
| US10256120B2 | Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning | Performing Operations; Transporting | 0 | Active |
| US11430672B2 | Drying environments for reducing substrate defects | Electricity | 0 | Active |
| US11710648B2 | Drying environments for reducing substrate defects | Electricity | 0 | Active |
| US9119461B2 | High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods | Electricity | 0 | Active |
| US9636714B2 | Compression molded articles employing circumferential surfaces having friction-enhancing patterns to contact substrates during wet chemical processes | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.