Collector mirror assembly and method for producing extreme ultraviolet radiation
US9013679B2 · kind B2 · utility
1Cited by
0References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2011 |
| Grant date | Apr 21, 2015 |
| Priority date | — |
| Expiry date | Dec 17, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K5/04
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A collector mirror assembly includes a collector mirror that includes a reflective surface and a hole having an edge. The hole extends through the reflective surface. The assembly also includes a tubular body having an inner surface and an outer surface. The tubular body is constructed and arranged to guide a gas flow in a direction substantially transverse to the reflective surface. The outer surface of the tubular body and the edge of the hole form an opening arranged to guide a further gas flow that diverges with respect the gas flow substantially transverse to the reflective surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.