Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system
US9019466B2 · kind B2 · utility
3Cited by
19References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 27, 2007 |
| Grant date | Apr 28, 2015 |
| Priority date | — |
| Expiry date | Aug 27, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70341
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lithographic apparatus that includes a reflector configured to reflect a cleaning beam of radiation projected through a projection system onto an underside of a liquid retrieval system. The construction of the reflector is also described as is a method for irradiating the underside of a liquid supply system for use in cleaning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.