Thomas Laursen
21Patents
8h-index
44Co-inventors
75Inventor score
Filing activity: Mar 13, 1992 → Jun 21, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7115017B1 | Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarization | Performing Operations; Transporting | 269 | Expired |
| US6258711A | Sacrificial deposit to improve damascene pattern planarization in semiconductor wafers | Electricity | 30 | Expired |
| US6821794B2 | Flexible snapshot in endpoint detection | Electricity | 26 | Expired |
| US5205226A | Low NO.sub.x burner system | Mechanical Engineering; Lighting; Heating | 17 | Expired |
| US6923711B2 | Multizone carrier with process monitoring system for chemical-mechanical planarization tool | Electricity | 15 | Expired |
| US6960115B2 | Multiprobe detection system for chemical-mechanical planarization tool | Electricity | 11 | Expired |
| US6572445B2 | Multizone slurry delivery for chemical mechanical polishing tool | Performing Operations; Transporting | 10 | Expired |
| US6805613B1 | Multiprobe detection system for chemical-mechanical planarization tool | Electricity | 9 | Expired |
| US7264537B1 | Methods for monitoring a chemical mechanical planarization process of a metal layer using an in-situ eddy current measuring system | Performing Operations; Transporting | 8 | Active |
| US5505146A | Burner pattern to minimize sidewall corrosion potential | Mechanical Engineering; Lighting; Heating | 6 | Expired |
| US7314402B2 | Method and apparatus for controlling slurry distribution | Electricity | 6 | Expired |
| US7887396B2 | Method and apparatus for controlled slurry distribution | Electricity | 5 | Active |
| US6521537B1 | Modification to fill layers for inlaying semiconductor patterns | Electricity | 4 | Expired |
| US6555466B1 | Two-step chemical-mechanical planarization for damascene structures on semiconductor wafers | Electricity | 4 | Expired |
| US9019466B2 | Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system | Physics | 3 | Active |
| US7004086B2 | Injection of overfire air through the upper furnace arch for penetration and mixing with flue gas | Mechanical Engineering; Lighting; Heating | 2 | Expired |
| US8042497B2 | Steam generator arrangement | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US6387188B1 | Pad conditioning for copper-based semiconductor wafers | Performing Operations; Transporting | 1 | Expired |
| US12050193B2 | Magnesium ion selective membranes | Physics | 0 | Active |
| US7622052B1 | Methods for chemical mechanical planarization and for detecting endpoint of a CMP operation | Performing Operations; Transporting | 0 | Active |
| US6869354B2 | Zero cooling air flow overfire air injector and related method | Mechanical Engineering; Lighting; Heating | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.