High surface resistivity electrostatic chuck

US9025305B2 · kind B2 · utility

Assignees

• ENTEGRIS, INC. · US
• Varian Semiconductor Equipment Associates, Inc. · US

Inventors

• Richard A. Cooke · Framingham, US
• Dale K. Stone · Lynnfield, US
• Lyudmila Stone · Lynnfield, US
• Julian G. Blake · Beverly Farms, US
• David E. Suuronen · Newburyport, US

Key dates

• Filing date: May 24, 2011
• Grant date: May 5, 2015
• Expiry date: May 24, 2031

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C04B2237/368
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck, the surface layer including a charge control layer comprising a surface resistivity of greater than about 1011 ohms per square.