David E. Suuronen
22Patents
6h-index
24Co-inventors
69Inventor score
Filing activity: May 16, 1988 → Aug 7, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5426411A | Current limiting fuse | Emerging Cross-Sectional Technologies | 48 | Expired |
| US5357234A | Current limiting fuse | Emerging Cross-Sectional Technologies | 40 | Expired |
| US5148141A | Fuse with thin film fusible element supported on a substrate | Electricity | 27 | Expired |
| US5115220A | Fuse with thin film fusible element supported on a substrate | Electricity | 25 | Expired |
| US4950195A | Cartridge fuse terminal adapter | Electricity | 15 | Expired |
| US5091712A | Thin film fusible element | Electricity | 11 | Expired |
| US9692325B2 | High conductivity electrostatic chuck | Electricity | 5 | Active |
| US9025305B2 | High surface resistivity electrostatic chuck | Chemistry; Metallurgy | 4 | Active |
| US4962977A | Electric fuse | Electricity | 2 | Expired |
| US8592786B2 | Platen clamping surface monitoring | Electricity | 2 | Active |
| US10113917B2 | System and method for in situ temperature measurement | Physics | 1 | Active |
| US8531814B2 | Removal of charge between a substrate and an electrostatic clamp | Emerging Cross-Sectional Technologies | 1 | Active |
| US7595972B2 | Clamp for use in processing semiconductor workpieces | Electricity | 1 | Active |
| US9417280B2 | System and method for analyzing voltage breakdown in electrostatic chucks | Physics | 1 | Active |
| US8681472B2 | Platen ground pin for connecting substrate to ground | Electricity | 0 | Active |
| US8268081B2 | Platen cleaning method | Electricity | 0 | Active |
| US10825645B2 | System and method for reduced workpiece adhesion due to electrostatic charge during removal from a processing station | Electricity | 0 | Active |
| US9082804B2 | Triboelectric charge controlled electrostatic clamp | Electricity | 0 | Active |
| US9824857B2 | Method for implantation of semiconductor wafers having high bulk resistivity | Electricity | 0 | Active |
| US7715170B2 | Electrostatic chuck with separated electrodes | Electricity | 0 | Active |
| US9953849B2 | Platen for reducing particle contamination on a substrate and a method thereof | Electricity | 0 | Active |
| US10658207B2 | Platen for reducing particle contamination on a substrate and a method thereof | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.