Movable microchamber system with gas curtain
US9029809B2 · kind B2 · utility
1Cited by
14References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 30, 2012 |
| Grant date | May 12, 2015 |
| Priority date | — |
| Expiry date | Oct 23, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0318
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A movable microchamber system with a gas curtain is disclosed. The microchamber system has a top member with a light-access feature and a stage assembly that supports a substrate to be processed. The stage assembly is disposed relative to the top member to define a microchamber and a peripheral microchamber gap. An inert gas is flowed into the peripheral microchamber gap to form the gas curtain just outside of the microchamber. The gas curtain substantially prevents reactive gas in the ambient environment from entering the microchamber when the stage assembly moves relative to the top member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.