Andrew Cowe
19Patents
6h-index
27Co-inventors
66Inventor score
Filing activity: Mar 12, 2001 → Sep 2, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9449793B2 | Systems, methods and apparatus for choked flow element extraction | Electricity | 450 | Active |
| US6815633B1 | Inductively-coupled toroidal plasma source | Electricity | 160 | Expired |
| US6872909B2 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | Electricity | 40 | Expired |
| US7166816B1 | Inductively-coupled torodial plasma source | Electricity | 32 | Expired |
| US7501600B2 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | Electricity | 9 | Active |
| US7659489B2 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | Electricity | 6 | Active |
| US9275839B2 | Toroidal plasma chamber for high gas flow rate process | Electricity | 5 | Active |
| US8692466B2 | Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator | Electricity | 3 | Active |
| US7914603B2 | Particle trap for a plasma source | Emerging Cross-Sectional Technologies | 1 | Active |
| US9070538B2 | Pinched plasma bridge flood gun for substrate charge neutralization | Electricity | 1 | Active |
| US11664197B2 | Method and apparatus for plasma generation | Electricity | 1 | Active |
| US8999104B2 | Systems, methods and apparatus for separate plasma source control | Electricity | 1 | Active |
| US9029809B2 | Movable microchamber system with gas curtain | Emerging Cross-Sectional Technologies | 1 | Active |
| US11854839B2 | Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation | Electricity | 0 | Active |
| US12159765B2 | Method and apparatus for plasma generation | Electricity | 0 | Active |
| US10283325B2 | Distributed multi-zone plasma source systems, methods and apparatus | Electricity | 0 | Active |
| US9155181B2 | Distributed multi-zone plasma source systems, methods and apparatus | Electricity | 0 | Active |
| US9967965B2 | Distributed, concentric multi-zone plasma source systems, methods and apparatus | Electricity | 0 | Active |
| US10424460B2 | Systems, methods and apparatus for choked flow element extraction | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.