Inventor · Andover, MA, US

Andrew Cowe

19Patents
6h-index
27Co-inventors
66Inventor score

Filing activity: Mar 12, 2001 → Sep 2, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9449793B2 Systems, methods and apparatus for choked flow element extraction Electricity 450 Active
US6815633B1 Inductively-coupled toroidal plasma source Electricity 160 Expired
US6872909B2 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel Electricity 40 Expired
US7166816B1 Inductively-coupled torodial plasma source Electricity 32 Expired
US7501600B2 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel Electricity 9 Active
US7659489B2 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel Electricity 6 Active
US9275839B2 Toroidal plasma chamber for high gas flow rate process Electricity 5 Active
US8692466B2 Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator Electricity 3 Active
US7914603B2 Particle trap for a plasma source Emerging Cross-Sectional Technologies 1 Active
US9070538B2 Pinched plasma bridge flood gun for substrate charge neutralization Electricity 1 Active
US11664197B2 Method and apparatus for plasma generation Electricity 1 Active
US8999104B2 Systems, methods and apparatus for separate plasma source control Electricity 1 Active
US9029809B2 Movable microchamber system with gas curtain Emerging Cross-Sectional Technologies 1 Active
US11854839B2 Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation Electricity 0 Active
US12159765B2 Method and apparatus for plasma generation Electricity 0 Active
US10283325B2 Distributed multi-zone plasma source systems, methods and apparatus Electricity 0 Active
US9155181B2 Distributed multi-zone plasma source systems, methods and apparatus Electricity 0 Active
US9967965B2 Distributed, concentric multi-zone plasma source systems, methods and apparatus Electricity 0 Active
US10424460B2 Systems, methods and apparatus for choked flow element extraction Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.