Temperature controlled showerhead for high temperature operations
US9034142B2 · kind B2 · utility
24Cited by
28References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 18, 2009 |
| Grant date | May 19, 2015 |
| Priority date | — |
| Expiry date | Aug 9, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/46
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A temperature controlled showerhead assembly for chemical vapor deposition (CVD) chambers enhances heat dissipation to provide accurate temperature control of the showerhead face plate and maintain temperatures substantially lower than surrounding components. Heat dissipates by conduction through a showerhead stem and removed by the heat exchanger mounted outside of the vacuum environment. Heat is supplied by a heating element inserted into the steam of the showerhead. Temperature is controlled using feedback supplied by a temperature sensor installed in the stem and in thermal contact with the face plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.