Control module for an ion implanter
US9035269B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 3, 2012 |
| Grant date | May 19, 2015 |
| Priority date | — |
| Expiry date | Oct 3, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R19/0061
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A control module for an ion implanter having a power supply, the power supply comprising: an electricity generator HT having its positive pole connected to ground; a first switch SW1 having its first pole connected to the negative pole of the generator HT and having its second pole connected to the outlet terminal S of the power supply; and a second switch SW2 having its first pole connected to the outlet terminal S and having its second pole connected to a neutralization terminal N. The control module also comprises a current measurement circuit AMP for measuring the current that flows between the second pole of the second switch SW2 and the neutralization terminal N.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.