Computer-implemented methods for performing one or more defect-related functions
US9037280B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2005 |
| Grant date | May 19, 2015 |
| Priority date | — |
| Expiry date | Oct 23, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B23/0221
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Computer-implemented methods for performing one or more defect-related functions are provided. One method for identifying noise in inspection data includes identifying events detected in a number of sets of inspection data that is less than a predetermined number as noise. One method for binning defects includes binning the defects into groups based on defect characteristics and the sets of the inspection data in which the defects were detected. One method for selecting defects for defect analysis includes binning defects into group(s) based on proximity of the defects to each other and spatial signatures formed by the group(s). A different method for selecting defects for defect analysis includes selecting defects having the greatest diversity of defect characteristic(s) for defect analysis. One method includes classifying defects on a specimen using inspection data generated for the specimen combined with defect review data generated for the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.