Structure and method for creating a reusable template for detachable thin film substrates
US9053957B2 · kind B2 · utility
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6Claims
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Key dates
| Filing date | May 17, 2013 |
| Grant date | Jun 9, 2015 |
| Priority date | — |
| Expiry date | May 17, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53265
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A structure and method operable to create a reusable template for detachable thin semiconductor substrates is provided. The reusable template has a three-dimensional (3-D) surface topography comprising a plurality of raised areas comprising a rounded top and separated by a plurality of depressed areas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.