Patent · US Active

Method for performing hot water seal on electrostatic chuck

US9054148B2 · kind B2 · utility

0Cited by

8References

12Claims

0Family size

Assignee

Lam Research Corporation · US

Inventors

Hong Shih · Santa Clara, US
Tuochuan Huang · Saratoga, US
David Schaefer · Alameda, US
Ambarish Chhatre · San Jose, US
John Daugherty · Fremont, US
MingHang Wu · Renton, US
Clifford Erik La Croix · Livermore, US

Key dates

Filing date	Aug 26, 2011
Grant date	Jun 9, 2015
Priority date	—
Expiry date	Aug 26, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T279/23
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A method is provided for treating a bipolar ESC having a front surface and a back surface, the front surface including an anodized layer. The method includes eliminating the anodized layer, disposing a new anodized layer onto the front surface, and treating the new anodized layer with water to seal the new anodized layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.