Compression member for use in showerhead electrode assembly
US9058960B2 · kind B2 · utility
5Cited by
5References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 9, 2012 |
| Grant date | Jun 16, 2015 |
| Priority date | — |
| Expiry date | Nov 11, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49803
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A compression member for use in a showerhead electrode assembly of a capacitively coupled plasma chamber. The member applies a compression force to a portion of a film heater adjacent a power supply boot on an upper surface of a thermal control plate and is located between the thermal control plate and a temperature-controlled top plate. The member is composed of an electrically insulating elastomeric material which can work over a large range of compressions and temperatures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.