Crystalline strontium titanate and methods of forming the same
US9062390B2 · kind B2 · utility
7Cited by
20References
18Claims
0Family size
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Key dates
| Filing date | Sep 11, 2012 |
| Grant date | Jun 23, 2015 |
| Priority date | — |
| Expiry date | Sep 11, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Methods of forming a crystalline strontium titanate layer may include providing a substrate with a crystal enhancement surface (e.g., Pt), depositing strontium titanate by atomic layer deposition, and conducting a post-deposition anneal to crystallize the strontium titanate. Large single crystal domains may be formed, laterally extending greater distances than the thickness of the strontium titanate and demonstrating greater ordering than the underlying crystal enhancement surface provided to initiate ALD. Functional oxides, particularly perovskite complex oxides, can be heteroepitaxially deposited over the crystallized STO.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.