Patent · US Active

Integrated circuit and method of forming integrated circuit

US9064719B1 · kind B1 · utility

14Cited by
10References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 4, 2014
Grant dateJun 23, 2015
Priority date
Expiry dateJul 4, 2034

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/48247

Abstract

An integrated circuit includes a capacitor and a non-inductive resistor. A substrate has a capacitor area and a resistor area. A patterned stacked structure including a bottom conductive layer, an insulating layer and a top conductive layer from bottom to top is sandwiched by a first dielectric layer and a second dielectric layer disposed on the substrate. A first metal plug and a second metal plug contact the top conductive layer and the bottom conductive layer of the capacitor area respectively, thereby the patterned stacked structure in the capacitor area constituting the capacitor. A third metal plug and a fourth metal plug contact the bottom conductive layer and the top conductive layer of the resistor area respectively, and a fifth metal plug contacts the bottom conductive layer and the top conductive layer of the resistor area simultaneously, thereby the patterned stacked structure in the resistor area constituting the non-inductive resistor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.