Vertical electronic fuse
US9064871B2 · kind B2 · utility
5Cited by
5References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2014 |
| Grant date | Jun 23, 2015 |
| Priority date | — |
| Expiry date | Jul 25, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electronic fuse structure including a first Mx metal comprising a conductive cap, an Mx+1 metal located above the Mx metal, wherein the Mx+1 metal does not comprise a conductive cap, and a via, wherein the via electrically connects the Mx metal to the Mx+1 metal in a vertical orientation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.