Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target
US9072153B2 · kind B2 · utility
12Cited by
8References
20Claims
0Family size
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Key dates
| Filing date | Aug 10, 2012 |
| Grant date | Jun 30, 2015 |
| Priority date | — |
| Expiry date | Aug 10, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0086
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
An apparatus used with a laser apparatus may include a chamber, a target supply for supplying a target material to a region inside the chamber, a laser beam focusing optical system for focusing a laser beam from the laser apparatus in the region, and an optical system for controlling a beam intensity distribution of the laser beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.