Liquid processing apparatus, liquid processing method, and recording medium having computer program for performing the same method
US9073103B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 15, 2011 |
| Grant date | Jul 7, 2015 |
| Priority date | — |
| Expiry date | Jan 9, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67173
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a liquid processing apparatus which includes: a plurality of liquid processing units to supply a processing liquid to an object to be processed and liquid-process the object; a common exhaust path to discharge atmospheres in the plurality of liquid processing units; an individual exhaust path to connect the common exhaust path with each of the liquid processing units; an opening-closing mechanism provided on the individual exhaust path to be openable; and an air injecting port to inject an air into the common exhaust path. An injection amount adjusting valve is provided on the common exhaust path to adjust the flow rate of the air injected from the air injecting port. A controller controls an opening degree of the injection amount adjusting valve based on an opening-closing state of the opening-closing mechanism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.