Particle detection system
US9076629B2 · kind B2 · utility
0Cited by
9References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 11, 2013 |
| Grant date | Jul 7, 2015 |
| Priority date | — |
| Expiry date | Jul 11, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2449
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention provides a design to process a large range of detection beam current at low noise with a single detector. With such a design, the detection system can generate up to 1010 gain and maximum signal output at more than mini Ampere (mA) level. A condenser lens is configured to increase bandwidth of the detector that scan speed can be enhanced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.