Apparatus and a method for investigating a sample by means of several investigation methods

US9080937B2 · kind B2 · utility

Assignee

• JPK INSTRUMENTS AG · DE

Inventors

• Gerd Behme · Berlin, DE
• Tilo Jankowski · Berlin, DE
• Torsten Jähnke · Berlin, DE

Key dates

• Filing date: Jul 9, 2013
• Grant date: Jul 14, 2015
• Expiry date: Aug 30, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q60/02
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sample carrier suitable for receiving a sample, a first investigation device for investigating the sample and having a first optical beam path for a first measurement light, a second investigation device for investigating the sample and having a second optical beam path for a second measurement light, wherein the first or the second investigation device comprises a probe microscope suitable for investigating the sample and an optical component having a light-permeable section for the first measurement light and an at least partially reflecting section for the second measurement light and disposed in the first and in the second beam path such that the first optical beam path is formed by a material of the optical component in the light-permeable section and that the second optical beam path is formed with a light-reflecting deflection at the at least one partially reflecting section is provided. An associated method is also provided.