Patent · US Active

Rigid probe with compliant characteristics

US9086433B2 · kind B2 · utility

0Cited by

7References

15Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

David M. Audette · Webster, US
Dustin M. Fregeau · South Burlington, US
David L. Gardell · Saint Albans, US
Grant Wagner · Jericho, US

Key dates

Filing date	Dec 19, 2012
Grant date	Jul 21, 2015
Priority date	—
Expiry date	Jul 12, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/07314
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe conducts testing of a circuit. The probe includes a base coupled to a substrate. The probe also includes a cantilever attached to the base at a first end, the cantilever deflecting from a first position to a second position in which a second end opposite the first end is in contact with the substrate and to move between the second position and the first position based on movement of a compliant bump of the circuit, and a probe tip attached to the cantilever at the second end, the probe tip maintaining contact with the compliant bump of the circuit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.