Ceramic coated article and process for applying ceramic coating

US9090046B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Jennifer Y. Sun · Mountain View, US
• Biraja P. Kanungo · San Jose, US
• Ren-Guan Duan · Fremont, US
• Sumit Agarwal · Dublin, US
• Dmitry Lubomirsky · Cupertino, US

Key dates

• Filing date: Jan 22, 2013
• Grant date: Jul 28, 2015
• Expiry date: Jan 22, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/24562
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

To manufacture a ceramic article, a ceramic body comprising Al2O3 is roughened to a roughness of approximately 140 micro-inches (μin) to 240 μin. The ceramic body is subsequently cleaned and then coated with a ceramic coating. The ceramic coating comprises a compound of Y4Al2O9 (YAM) and a solid solution of Y2-xZrxO3. The ceramic coating is then polished.