Inventor · Dublin, CA, US

Sumit Agarwal

14Patents
2h-index
36Co-inventors
46Inventor score

Filing activity: Jan 22, 2013 → Aug 2, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US9090046B2 Ceramic coated article and process for applying ceramic coating Emerging Cross-Sectional Technologies 64 Active
US9653320B2 Methods for etching a hardmask layer for an interconnection structure for semiconductor applications Electricity 4 Active
US9359679B2 Methods for cyclically etching a metal layer for an interconnection structure for semiconductor applications Electricity 2 Active
US8932959B2 Method and system for etching plural layers on a workpiece including a lower layer containing an advanced memory material Electricity 1 Active
US9960052B2 Methods for etching a metal layer to form an interconnection structure for semiconductor applications Electricity 1 Active
US11992900B2 Methods to fabricate chamber component holes using laser drilling General 0 Revoked
US11332827B2 Gas distribution plate with high aspect ratio holes and a high hole density Chemistry; Metallurgy 0 Active
US11819948B2 Methods to fabricate chamber component holes using laser drilling Performing Operations; Transporting 0 Active
US11111582B2 Porous showerhead for a processing chamber Chemistry; Metallurgy 0 Active
US11598004B2 Lid assembly apparatus and methods for substrate processing chambers Chemistry; Metallurgy 0 Active
US11851758B2 Fabrication of a high temperature showerhead Emerging Cross-Sectional Technologies 0 Active
US11371148B2 Fabricating a recursive flow gas distribution stack using multiple layers Physics 0 Active
US11905583B2 Gas quench for diffusion bonding Electricity 0 Active
US12030135B2 Methods to fabricate chamber component holes using laser drilling Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.