Mechanism for forming MEMS device
US9090452B2 · kind B2 · utility
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Key dates
| Filing date | Dec 6, 2013 |
| Grant date | Jul 28, 2015 |
| Priority date | — |
| Expiry date | Dec 6, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B3/0005
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Embodiments of mechanisms for forming a micro-electro mechanical system (MEMS) device are provided. The MEMS device includes a substrate and a MEMS substrate disposed on the substrate. The MEMS substrate includes a movable element, a fixed element and at least a spring connected to the movable element and the fixed element. The MEMS device also includes a polysilicon layer on the movable element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.