Showerhead electrode assembly with gas flow modification for extended electrode life
US9093483B2 · kind B2 · utility
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15References
17Claims
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Key dates
| Filing date | Mar 5, 2014 |
| Grant date | Jul 28, 2015 |
| Priority date | — |
| Expiry date | Mar 5, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A showerhead electrode assembly for a plasma processing apparatus is provided. The showerhead electrode assembly includes a first member attached to a second member. The first and second members have first and second gas passages in fluid communication. When a process gas is flowed through the gas passages, a total pressure drop is generated across the first and second gas passages. A fraction of the total pressure drop across the second gas passages is greater than a fraction of the total pressure drop across the first gas passages.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.