Patent · US Active

System, method and computer program product for classification within inspection images

US9098893B2 · kind B2 · utility

4Cited by
3References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 21, 2011
Grant dateAug 4, 2015
Priority date
Expiry dateApr 19, 2032

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06T2207/30148
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

In accordance with an aspect of the presently disclosed subject matter, there is provided an analysis system for classifying possible defects identified within an inspection image of an inspected object, the system comprising a pattern matcher configured to determine an anchor location with respect to the inspection image, based on a matching of a template and a portion of the inspection image; wherein an accuracy of the determining of the anchor location exceeds a resolution of the inspection image; a distribution analysis module configured to determine, based on the anchor location and a mask which defines different segments within an area, a distribution of a potential defect with respect to one or more of the segments; and a classifier, configured to classify the potential defect based on the distribution.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.