Patent · US Active

Method of manufacturing switching filters and design structures

US9099982B2 · kind B2 · utility

6Cited by

7References

18Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

James W. Adkisson · Jericho, US
Panglijen Candra · South Burlington, US
Thomas J. Dunbar · Burlington, US
Jeffrey P. Gambino · Gresham, US
Mark D. Jaffe · Shelburne, US
Anthony K. Stamper · Williston, US
Randy L. Wolf · South Burlington, US

Key dates

Filing date	Jan 25, 2012
Grant date	Aug 4, 2015
Priority date	—
Expiry date	Jul 29, 2033

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49155
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Switchable and/or tunable filters, methods of manufacture and design structures are provided herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a fixed electrode with a plurality of fingers on the piezoelectric substrate. The method further includes forming a moveable electrode with a plurality of fingers over the piezoelectric substrate. The method further includes forming actuators aligned with one or more of the plurality of fingers of the moveable electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.