TEM-lamella, process for its manufacture, and apparatus for executing the process
US9103753B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 28, 2011 |
| Grant date | Aug 11, 2015 |
| Priority date | — |
| Expiry date | Aug 25, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24479
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A process for manufacturing a TEM-lamella includes mounting (51) a plate shaped substrate having a thickness in a support, manufacturing (53) a first, strip-shaped recess on a first side of the substrate under a first angle to the support by means of a particle beam, and manufacturing (55) a second strip-shaped recess on a second side of the substrate under a second angle to the support by means of a particle beam, such that the first and the second strip-shaped recess mutually form an acute or right angle, and between them form an overlap region of lesser thickness. The lamella has a thicker rim region and a thinner central region, with a first strip-shaped, recess on a first side of the lamella and a second strip-shaped recess on a second side of the lamella, wherein the first and the second strip-shaped recess mutually form an acute or right angle, and between them form an overlap region having a thickness of below 100 nm. An apparatus for executing the process or manufacturing the lamella includes a lamella support pivotable about a transverse axis and a longitudinal axis inclined, to the vertical direction, a device for rotating about the longitudinal axis, and stop means for …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.