Apparatus of plural charged particle beams with multi-axis magnetic lens
US9105440B2 · kind B2 · utility
5Cited by
4References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 26, 2014 |
| Grant date | Aug 11, 2015 |
| Priority date | — |
| Expiry date | Aug 26, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus of plural charged particle beams with multi-axis magnetic lens is provided to perform multi-functions of observing a specimen surface, such as high-throughput inspection and high-resolution review of interested features thereof and charge-up control for enhancing image contrast and image resolution. In the apparatus, two or more sub-columns are formed and each of the sub-columns performs one of the multi-functions. Basically the sub-columns take normal illumination to get high image resolutions, but one or more may take oblique illuminations to get high image contrasts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.