Liquid processing apparatus and liquid processing method
US9105671B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 23, 2012 |
| Grant date | Aug 11, 2015 |
| Priority date | — |
| Expiry date | Oct 23, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB60B2900/325
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A liquid processing apparatus includes a substrate retaining part that retains a substrate in a horizontal position and rotates the substrate, first and second processing liquid supply nozzles disposed to supply first and second processing liquids, respectively, to the substrate, liquid receiving cups disposed to appropriately position an upper end thereof above the substrate and to receive the first or second processing liquid that has been supplied to the substrate, a first tubular outer cup including an upper opening and disposed around the liquid receiving cup, vertically movable between a lifted position to which the first tubular outer cup is lifted so that its upper end is positioned above the liquid receiving cup, and a lowered position lower than the lifted position, and a second tubular outer cup disposed externally to the first tubular outer cup. The tubular outer cup is selected according to the kind of processing liquid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.