Force sensing system for substrate lifting apparatus

US9108322B2 · kind B2 · utility

Assignee

• Varian Semiconductor Equipment Associates, Inc. · US

Inventors

• Richard V. Chisholm · Swampscott, US
• Scott E. Peitzsch · Tewksbury, US
• Michael Esposito · Patchogue, US
• Robert A. Poitras · Rockport, US
• Steven M. Anella · West Newbury, US
• Daniel A. Hall · Somerville, US
• Scott C. Holden · Attleboro, US
• Roger B. Fish · Bedford, US

Key dates

• Filing date: Jun 14, 2013
• Grant date: Aug 18, 2015
• Expiry date: Aug 25, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S901/02
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A system and method for monitoring forces on a substrate lifting apparatus. The system includes a platen cartridge with a platen and a movable lifting portion. The movable lifting portion includes a plurality of lifting arms coupled to a plurality of lift pins. A plurality of force sensing elements are associated with respective ones of the plurality of lifting arms and the plurality of lift pins. A controller receives signals from the plurality of force sensing elements, correlates the signals to respective forces applied to said plurality of lift pins. The correlated forces may indicate to the controller that an error condition exists, such as a stuck wafer, a broken wafer, a mis-positioned wafer, or a mechanical malfunction.