Patent · US Active

Horizontally and vertically aligned graphite nanofibers thermal interface material for use in chip stacks

US9111899B2 · kind B2 · utility

2Cited by
24References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 13, 2012
Grant dateAug 18, 2015
Priority date
Expiry dateSep 27, 2032

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/01322
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

The chip stack of semiconductor chips with enhanced cooling apparatus includes a first chip with circuitry on a first side and a second chip electrically and mechanically coupled to the first chip by a grid of connectors. The apparatus further includes a thermal interface material pad placed between the first chip and the second chip, wherein the thermal interface material pad includes nanofibers aligned parallel to mating surfaces of the first chip and the second chip and nanofibers aligned perpendicular to mating surfaces of the first chip and the second chip.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.