Patent · US Active

Apparatus and method for investigating an object

US9115981B2 · kind B2 · utility

1Cited by

2References

25Claims

0Family size

Assignee

Carl Zeiss SMS Ltd. · IL

Inventors

Christof Baur · Darmstadt, DE
Klaus Edinger · Lorsch, DE
Thorsten Hofmann · Rodgau, DE
Gabriel Baralia · Darmstadt, DE
Michael Budach · Hanau, DE

Key dates

Filing date	Sep 26, 2013
Grant date	Aug 25, 2015
Priority date	—
Expiry date	Sep 26, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/30444
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The present invention refers to an apparatus and a method for investigating an object with a scanning particle microscope and at least one scanning probe microscope with a probe, wherein the scanning particle microscope and the at least one scanning probe microscope are spaced with respect to each other in a common vacuum chamber so that a distance between the optical axis of the scanning particle microscope and the measuring point of the scanning probe microscope in the direction perpendicular to the optical axis of the scanning particle microscope is larger than the maximum field of view of both the scanning probe microscope and the scanning particle microscope, wherein the method comprises the step of determining the distance between the measuring point of the scanning probe microscope and the optical axis of the scanning particle microscope.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.