Patent · US Active

Method and apparatus of tuning a scanning probe microscope

US9116167B2 · kind B2 · utility

0Cited by
2References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 31, 2015
Grant dateAug 25, 2015
Priority date
Expiry dateMar 31, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01Q40/00
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.