Patent · US Active

Optical element unit and method of supporting an optical element

US9134501B2 · kind B2 · utility

5Cited by

14References

42Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Dirk Schaffer · Jena, DE
Willi Heintel · Aalen, DE
Hagen Federau · Augsburg, DE
Joachim Hartjes · Aalen, DE
Harald Kirchner · Munich, DE

Key dates

Filing date	Sep 14, 2007
Grant date	Sep 15, 2015
Priority date	—
Expiry date	Oct 25, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG02B7/008
WIPO fieldOptics
WIPO sectorInstruments

Abstract

There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.