Illumination and displacement device for a projection exposure apparatus

US9134613B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Sonja Schneider · Lehrberg, DE
• Norbert Wabra · Werneck, DE
• Martin von Hodenberg · Oberkochen, DE
• Boris Bittner · Roth, DE
• Ricarda Schneider · Zusmarshausen, DE

Key dates

• Filing date: May 8, 2014
• Grant date: Sep 15, 2015
• Expiry date: May 8, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70558
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An illumination and displacement device for a projection exposure apparatus comprises an illumination optical unit for illuminating an illumination field. An object holder serves for mounting an object in such a way that at least one part of the object can be arranged in the illumination field. An object holder drive serves for displacing the object during illumination in an object displacement direction. A correction device serves for the spatially resolved influencing of an intensity of the illumination at least of sections of the illumination field, wherein there is a spatial resolution of the influencing of the intensity of the illumination of the illumination field at least along the object displacement direction. This results in an illumination and displacement device in which field-dependent imaging aberrations which are present during the projection exposure do not undesirably affect a projection result.