Patent · US Active

Method and apparatus for scanning a surface of an object using a particle beam

US9136090B2 · kind B2 · utility

0Cited by

4References

19Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Ralph Pulwey · Aalen, DE
Josef Biberger · Rottenburg a. d. Laaber, DE

Key dates

Filing date	May 29, 2013
Grant date	Sep 15, 2015
Priority date	—
Expiry date	May 29, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/30488
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method of scanning a surface of an object using a particle beam comprises: determining a surface portion of the surface of the object, wherein the surface portion is to be scanned; determining initial positions of a set of raster points within the surface portion; changing the positions of at least some raster points of the set of raster points; and then scanning the surface portion by directing the particle beam to the positions of the raster points.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.