Patent · US Active

Device for separating a substrate from a carrier substrate

US9138978B2 · kind B2 · utility

1Cited by

12References

8Claims

0Family size

Assignee

EV Group GmbH · AT

Inventors

Markus Wimplinger · Ried im Innkreis, AT
Friedrich Paul Lindner · Ried im Innkreis, AT

Key dates

Filing date	Feb 28, 2013
Grant date	Sep 22, 2015
Priority date	—
Expiry date	Feb 28, 2033

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T156/1972
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Device for separating a substrate from a carrier substrate which is connected to the substrate by an interconnect layer. The device includes a carrier substrate holder with a holding surface for holding the carrier substrate. A substrate holder is located opposite the carrier substrate holder. The substrate holder has a substrate holding surface which can be located parallel to the holding surface of the carrier substrate holder. A separating means is provided for parallel displacement of the substrate relative to the carrier substrate in the interconnected state of the substrate and carrier substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.