Electrolyte loop with pressure regulation for separated anode chamber of electroplating system
US9139927B2 · kind B2 · utility
6Cited by
46References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2013 |
| Grant date | Sep 22, 2015 |
| Priority date | — |
| Expiry date | Nov 15, 2033 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D21/18
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An electrolyte, and particularly anolyte, may be circulated via an open loop having a pressure regulator, so that the pressure in the plating chamber is maintained at a constant (or substantially constant) value with respect to atmospheric pressure. In these embodiments, a pressure regulator is in fluid communication with the anode chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.