Patent · US Active

Method of generating a recipe for a manufacturing tool and system thereof

US9141730B2 · kind B2 · utility

1Cited by
7References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 12, 2011
Grant dateSep 22, 2015
Priority date—
Expiry dateAug 9, 2032

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02P90/02
  • WIPO fieldControl
  • WIPO sectorInstruments

Abstract

A computer creates a recipe for a manufacturing tool based on design data. The computer obtains the design data, which includes basic elements and hierarchical levels corresponding to the basic elements. The computer selects one or more basic elements of interest and generates one or more sets of simple array cells corresponding to a level of interest. The computer uses the sets of simple array cells to identify periodical areas in level-of-interest coordinates to enable automated recipe creation. The periodical areas are identified with respect to one or more basic elements.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.